A boron etch-stop assisted lateral silicon etching process for improved high-aspect-ratio silicon micromachining and its applications
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Silicon as a mechanical material
2. Released Si microstructures fabricated by deep etching and shallow diffusion
3. SCREAM I: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures
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