Mechanical behavior analysis on electrostatically actuated rectangular microplates-Reference-Cited by-同舟云学术

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Mechanical behavior analysis on electrostatically actuated rectangular microplates

Published:2015-02-04 Issue:3 Volume:25 Page:035007
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Li Zhikang,Zhao Libo,Jiang Zhuangde,Ye Zhiying,Dai Lu,Zhao Yulong

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/25/i=3/a=035007/pdf

Reference31 articles.

1. Self-affine roughness influence on the pull-in voltage in capacitive electromechanical devices

2. Analysis of small deflection touch mode behavior in capacitive pressure sensors

3. Effect of temperature on capacitive RF MEMS switch performance—a coupled-field analysis

4. Optimization of design and characterization of a novel micro-pumping system with peristaltic motion

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1. A size-dependent axisymmetric plate element: application to MEMS;Archive of Applied Mechanics;2024-02-08

2. Investigation of Static and Dynamic Characteristics of an Electrostatically Actuated Rectangular Microplate with Axial Internal Stress and Transverse Pressure;Journal of Vibration Engineering & Technologies;2022-07-12

3. Nonlinear behavior analysis of electrostatically actuated multilayer anisotropic microplates with residual stress;Composite Structures;2021-01

4. Capacitive micromachined ultrasonic transducers for transmitting and receiving ultrasound in air;Journal of Micromechanics and Microengineering;2019-10-31

5. Design and Analysis of Capacitive Micromachined Ultrasonic Transducer;Recent Patents on Engineering;2019-05-27

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