Analysis of small deflection touch mode behavior in capacitive pressure sensors-Reference-Cited by-同舟云学术

Analysis of small deflection touch mode behavior in capacitive pressure sensors

Published:2010-06 Issue:1-2 Volume:161 Page:114-119
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Fragiacomo Giulio,Ansbæk Thor,Pedersen Thomas,Hansen Ole,Thomsen Erik V.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

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2. Capacitive Sensors: Design and Applications;Baxter,1997

3. A batch-processed vacuum-sealed capacitive pressure sensor;Chavan,1997

4. Theory of Plates and Shells;Timoshenko,1959

5. Theories and Applications of Plate Analysis;Szilard,2004

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