Experimental study of a variable-capacitance micromotor with electrostatic suspension-Reference-Cited by-同舟云学术

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Experimental study of a variable-capacitance micromotor with electrostatic suspension

Published:2010-10-25 Issue:11 Volume:20 Page:115034
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Han F T,Wu Q P,Wang L

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference29 articles.

1. IC-processed electrostatic synchronous micromotors

2. A study of three microfabricated variable-capacitance motors

3. Frictional study of IC-processed micromotors

4. Torque evaluation of a LIGA fabricated electrostatic micromotor

5. Electrical levitation for micromotors, microgyroscopes and microaccelerometers

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1. An electrostatic micromotor based on electrets;IET Nanodielectrics;2023-07-29

2. A High-Speed Chip-Scale Rotary Polygon Optical Scanner Based on a Micromotor Integrated With a Micro-Polyhedron Mirror;Journal of Microelectromechanical Systems;2022-08

3. Damping analysis of micro-gyroscope with ball-disk rotor;AIP Advances;2022-08-01

4. Dynamic Characteristics of Microring Driven by the Symmetrically Distributed Electrostatic Force;Complexity;2021-02-04

5. Introduction to Levitation Micro-Systems;Microsystems and Nanosystems;2020-11-19

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