Frictional study of IC-processed micromotors-Reference-Cited by-同舟云学术

Frictional study of IC-processed micromotors

Published:1990-02 Issue:1-3 Volume:21 Page:180-183
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Yu-Chong Tai,Muller Richard S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. IC-processed electrostatic micro-motors;Fan;IEEE Int. Electron Devices Meet., San Francisco, CA, U.S.A.,11141988

2. IC-processed electrostatic synchronous micromotors;Tai;Sensors and Actuators,1989

3. IC-processed micro-motors: design, technology, and testing;Tai;Tech. Digest, IEEE Micro Electro Mechanical Systems Workshop, Salt Lake City, UT,20221989

Cited by 92 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. CMOS-MEMS electrostatic micromotor based on FGMOS transduction by electromechanical modification of its coupling coefficient and low operating voltage;Microsystem Technologies;2024-04-17

2. Feasibility of Optical Bearing Fabrication Using Radiation Pressure;Micromachines;2022-05-02

3. Low-Friction, High-Speed Rotary 3-Phase Micromotor Using the PolyMUMPS Process;Journal of Microelectromechanical Systems;2020-08

4. The numerical modeling of rotor–stator rubbing in rotating machinery: a comprehensive review;Nonlinear Dynamics;2020-07

5. Surface modification of single-crystalline silicon carbide by laser irradiation for microtribological applications;Precision Engineering;2018-10