Thermal actuation of a GaAs cantilever beam-Reference-Cited by-同舟云学术

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Thermal actuation of a GaAs cantilever beam

Published:2000-05-23 Issue:2 Volume:10 Page:293-298
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Lalinský T,Burian E,Drzík M,Hascík S,Mozolová Z,Kuzmík J

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. III–V micromachined devices for microsystems

2. Gallium arsenide as a mechanical material

3. Monolithic GaAs MESFET power sensor microsystem

4. The fabrication of thin GaAs cantilever beams for power sensor microsystem using RIE

5. Patterning of cantilevers for power sensor microsystem

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2. Nanocombinatorics with Cantilever-Free Scanning Probe Arrays;ACS Nano;2018-12-18

3. Diffraction phase microscopy imaging and multi-physics modeling of the nanoscale thermal expansion of a suspended resistor;Scientific Reports;2017-07-04

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