Precise motion control of a nanopositioning PZT microstage using integrated capacitive displacement sensors
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. A flexure hinge mechanism meets the demand for XY motion mechanism driven by one piezoelectric element
2. A new piezodriven precision micropositioning stage utilizing flexure hinges
3. Fine motion control of a moving stage using a piezoactuator associated with a displacement amplifier
4. A piezodriven XY-microstage for multiprobe nanorecording
5. Piezoactuator-integrated monolithic microstage with six degrees of freedom
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