Author:
Zhang Deyuan,Chang Chienliu,Ono Takahito,Esashi Masayoshi
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Microprobe array with electrical interconnection for thermal imaging and data storage;Lee;J. Microelectromech. Syst.,2002
2. http://csns.snu.ac.kr/.
3. http://www.maschinenbau.tu-ilmenau.de/mb/wwwmm/aindex-e.htm/.
4. Electromagnetic micro X–Y stage with very thick Cu coil for probe-based mass data storage device;Choi;Proc. SPIE,2001
5. Z.L. Zhang, N.C. Macdonald, Compound Stage MEM Actuator Suspended for Multidimensional Motion, US Patent No. 5,536,988 (1996).
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