Fabrication of micro/nano-structures using focused ion beam implantation and XeF2gas-assisted etching-Reference-Cited by-同舟云学术

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Fabrication of micro/nano-structures using focused ion beam implantation and XeF2gas-assisted etching

Published:2009-04-14 Issue:5 Volume:19 Page:054003
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Xu Z W,Fang F Z,Fu Y Q,Zhang S J,Han T,Li J M

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Recent Developments in Nanofabrication Using Focused Ion Beams

2. Redeposition characteristics of focused ion beam milling for nanofabrication

3. TEM Sample Preparation and FIB-Induced Damage

4. Fabrication of Si microstructures using focused ion beam implantation and reactive ion etching

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