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Scanning grating based in-plane movement sensing

  • Published:2010-07-02 Issue:8 Volume:20 Page:085007
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Yu Hongbin,Zhou Guangya,Sinha Sujeet Kumar,Chau Fook Siong

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. In-Plane Displacement Detection With Picometer Accuracy on a Conventional Microscope;Journal of Microelectromechanical Systems;2015-06

2. Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications;Journal of Nanophotonics;2014-07-15

3. Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor;Journal of Nanophotonics;2012-03-29

4. MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution;International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies;2011-06-09

5. Nano-tribometer integrated with a nano-photonic displacement-sensing mechanism;Journal of Micromechanics and Microengineering;2011-05-04
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