In-Plane Displacement Detection With Picometer Accuracy on a Conventional Microscope-Reference-Cited by-同舟云学术

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In-Plane Displacement Detection With Picometer Accuracy on a Conventional Microscope

Published:2015-06 Issue:3 Volume:24 Page:618-625
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Kokorian Jaap^ORCID,Buja Federico,van Spengen Willem Merlijn

Funder

Dutch Netherlands Organisation for Scientific Research-Stichting voor Technologie en Wetenschap Foundation, Utrecht, The Netherlands, through the Vidi Program

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/7115985/06857981.pdf?arnumber=6857981

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Detection of In-Plane Movement in Electrically Actuated Microelectromechanical Systems Using a Scanning Electron Microscope;Micromachines;2023-03-22

2. Angular error measurement of workpiece repositioning using a full-scale rotation detection method;Optics Express;2023-01-25

3. Simultaneous measurement of displacement and temperature using a balloon-like hybrid fiber sensor;Optics Letters;2022-07-19

4. Microscale creep and stress relaxation experiments with individual collagen fibrils;Optics and Lasers in Engineering;2022-03

5. Sensor Integrated Load-Bearing Structures: Measuring Axis Extension with DIC-Based Transducers;Sensors;2021-06-15

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