Author:
Schulte-Borchers M,Vetter U,Koppe T,Hofsäss H
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
5 articles.
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1. Proton beam writing of dye doped polymer microlasers;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-04
2. Modeling Electrochemical Etching of Proton Irradiated p-GaAs for the Design of MEMS Building Blocks;Journal of Microelectromechanical Systems;2014-08
3. Greyscale proton beam writing in p-type Gallium Arsenide;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-07
4. On the formation of silicon wires produced by high-energy ion irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-02
5. Three-dimensional silicon micromachining;Journal of Micromechanics and Microengineering;2012-09-25