Author:
Vanga Sudheer Kumar,Bettiol Andrew A.
Subject
Instrumentation,Nuclear and High Energy Physics
Reference17 articles.
1. Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30nm dimensions;van Kan;Nucl. Instr. Meth. Phys. Res. B Beam Interact. Mater. Atoms,2005
2. The second generation Singapore high resolution proton beam writing facility;van Kan;Rev. Sci. Instrum.,2012
3. Proton micromachining: a new technique for the production of three-dimensional microstructures;van Kan;Nucl. Instr. Meth. Phys. Res. B,2000
4. Fabrication of silicon microstructures using a high energy ion beam;Teo;Proc. SPIE,2004
5. Fabrication of microstructures in III–V semiconductors by proton beam writing;Menzel;Nucl. Instr. Meth. Phys. Res. B Beam Interact. Mater. Atoms,2009
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献