Fundamental limitations of LIGA x-ray lithography: sidewall offset, slope and minimum feature size
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference33 articles.
1. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
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5. Calculation and experimental determination of the structure transfer accuracy in deep x-ray lithography
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