Computer-aided characterization of the elastic properties of thin films-Reference-Cited by-同舟云学术

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Computer-aided characterization of the elastic properties of thin films

Published:1992-09-01 Issue:3 Volume:2 Page:173-175
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Maier-Schneider D,Maibach J,Obermeier E

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. A technique for the determination of stress in thin films

2. Mechanical property measurements of thin films using load-deflection of composite rectangular membranes

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