Stress engineering for free-standing SU-8 2002 thin film devices
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SPIE
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization;Journal of Micromechanics and Microengineering;2022-06-01
2. A High‐Fidelity Skin‐Attachable Acoustic Sensor for Realizing Auditory Electronic Skin;Advanced Materials;2022-04-12
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