Four-zone varifocus mirrors with adaptive control of primary and higher-order spherical aberration

Author:

Lukes Sarah J.,Downey Ryan D.,Kreitinger Seth T.,Dickensheets David L.

Funder

National Science Foundation (NSF)

National Institutes of Health (NIH)

Publisher

The Optical Society

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Varifocal MEMS mirrors for high-speed axial focus scanning: a review;Microsystems & Nanoengineering;2023-10-27

2. Aspherical High-Speed Varifocal Piezoelectric MEMS Mirror;2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers);2021-06-20

3. Simulative and Experimental Characterization of an Adaptive Astigmatic Membrane Mirror;Micromachines;2021-02-05

4. MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope;Light: Science & Applications;2019-06-26

5. MEMS-in-the-lens 3D beam scanner for in vivo microscopy;MOEMS and Miniaturized Systems XVIII;2019-03-04

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