KrF excimer laser micromachining of MEMS materials: characterization and applications-Reference-Cited by-同舟云学术

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KrF excimer laser micromachining of MEMS materials: characterization and applications

Published:2011-12-23 Issue:1 Volume:22 Page:015012
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Liu Kewei,NiCkolov Zhorro,Oh Jonghyun,“Moses” Noh Hongseok

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Excimer laser micromachining with half-tone masks for the fabrication of 3-D microstructures

2. A novel microdevice for the treatment of hydrocephalus: design and fabrication of an array of microvalves and microneedles

3. Recent applications of pulsed lasers in advanced materials processing

4. An overview on laser microfabrication of bicompatible metallic stent for medical therapy

5. Polymer laser photochemistry, ablation, reconstruction, and polymerization

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1. Improvement of surface morphology and laser performance of garnet laser crystals by 193 nm ArF excimer laser processing;Optics & Laser Technology;2024-12

2. Study on ablation properties of PDMS by 193 nm and 248 nm excimer laser;International Conference on Optoelectronic Materials and Devices (ICOMD 2022);2023-03-09

3. Correlation between chemical structural changes and laser fluence in femtosecond laser processing of polydimethylsiloxane;Applied Physics A;2022-08-30

4. A critical review of copper electroless deposition on glass substrates for microsystems packaging applications;Surface Engineering;2022-06-03

5. An Inkjet Printed Flexible Electrocorticography (ECoG) Microelectrode Array on a Thin Parylene-C Film;Sensors;2022-02-08

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