Polymer laser photochemistry, ablation, reconstruction, and polymerization
Author:
Publisher
Elsevier BV
Subject
Organic Chemistry,Physical and Theoretical Chemistry,Catalysis
Reference107 articles.
1. Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser
2. Deep uv submicron lithography by using a pulsed high‐power excimer laser
3. Ablative photodecomposition: action of far-ultraviolet (193 nm) laser radiation on poly(ethylene terephthalate) films
4. Self‐developing photoetching of poly(ethylene terephthalate) films by far‐ultraviolet excimer laser radiation
5. Self‐developing resist with submicrometer resolution and processing stability
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