Self‐developing photoetching of poly(ethylene terephthalate) films by far‐ultraviolet excimer laser radiation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93601
Reference5 articles.
1. Organic photochemistry with 6.7-eV photons: irradiation of molecular oxygen in hydrocarbon solution
2. Organic photochemistry with 6.7-eV photons: irradiation of molecular oxygen in hydrocarbon solution
3. Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser
4. Ultrafast High-Resolution Contact Lithography with Excimer Lasers
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