Variation of the intrinsic stress gradient in thin aluminum nitride films
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0960-1317/23/i=9/a=095030/pdf
Reference31 articles.
1. Dual-beam actuation of piezoelectric AlN RF MEMS switches monolithically integrated with AlN contour-mode resonators
2. Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
3. Thin-Film Bulk-Acoustic-Resonator Gas Sensor Functionalized With a Nanocomposite Langmuir–Blodgett Layer of Carbon Nanotubes
4. On the applicability of high frequency acoustic shear mode biosensing in view of thickness limitations set by the film resonance
5. Highly sensitive detection of organophosphorus pesticides by acetylcholinesterase-coated thin film bulk acoustic resonator mass-loading sensor
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