Dual-beam actuation of piezoelectric AlN RF MEMS switches monolithically integrated with AlN contour-mode resonators-Reference-Cited by-同舟云学术

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Dual-beam actuation of piezoelectric AlN RF MEMS switches monolithically integrated with AlN contour-mode resonators

Published:2008-09-05 Issue:10 Volume:18 Page:105011
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Mahameed Rashed,Sinha Nipun,Pisani Marcelo B,Piazza Gianluca

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference36 articles.

2. Micromechanical switches fabricated using nickel surface micromachining

3. MEMS microswitches for reconfigurable microwave circuitry

4. Single-Pole Eight-Throw RF MEMS Rotary Switch

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