Miniaturized CO<sub>2</sub> Gas Sensor Using 20% ScAlN-Based Pyroelectric Detector-Reference-Cited by-同舟云学术

Miniaturized CO₂ Gas Sensor Using 20% ScAlN-Based Pyroelectric Detector

Published:2022-08-09 Issue:8 Volume:7 Page:2345-2357
ISSN:2379-3694
Container-title:ACS Sensors
language:en
Short-container-title:ACS Sens.

Author:

Ng Doris Keh Ting¹^ORCID,Xu Linfang¹,Chen Weiguo¹,Wang Huanhuan¹,Gu Zhonghua¹,Chia Xavier Xujie¹²^ORCID,Fu Yuan Hsing¹,Jaafar Norhanani¹,Ho Chong Pei¹,Zhang Tantan¹,Zhang Qingxin¹,Lee Lennon Yao Ting¹^ORCID

Affiliation:

1. Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore

2. Photonics Devices and Systems Group, Engineering Product Development, Singapore University of Technology and Design, 8 Somapah Road, Singapore 487372, Singapore

Funder

Agency for Science, Technology and Research

National Research Foundation Singapore

Publisher

American Chemical Society (ACS)

Subject

Fluid Flow and Transfer Processes,Process Chemistry and Technology,Instrumentation,Bioengineering

Link

https://pubs.acs.org/doi/pdf/10.1021/acssensors.2c00980

Reference65 articles.

1. Direct human health risks of increased atmospheric carbon dioxide

2. Measurement of CO2 concentration for occupancy estimation in educational buildings with energy efficiency purposes