NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector-Reference-Cited by-同舟云学术

NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector

Published:2021-11 Issue: Volume:346 Page:130437
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Ng Doris Keh Ting^ORCID,Ho Chong Pei,Xu Linfang,Chen Weiguo,Fu Yuan Hsing,Zhang Tantan,Siow Li Yan,Jaafar Norhanani,Ng Eldwin Jiaqiang,Gao Yuan,Cai Hong,Zhang Qingxin,Lee Lennon Yao Ting^ORCID

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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