NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector

Author:

Ng Doris Keh TingORCID,Ho Chong Pei,Xu Linfang,Chen Weiguo,Fu Yuan Hsing,Zhang Tantan,Siow Li Yan,Jaafar Norhanani,Ng Eldwin Jiaqiang,Gao Yuan,Cai Hong,Zhang Qingxin,Lee Lennon Yao TingORCID

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference38 articles.

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4. Indoor carbon dioxide concentrations and sick building syndrome symptoms in the base study revisited: analyses of the 100 building dataset;Erdmann;Proc. Indoor Air,2002

5. How can airborne transmission of COVID-19 indoors be minimized;Morawska;Environ. Int.,2020

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