Improvement in negative bias illumination stress stability of In–Ga–Zn–O thin film transistors using HfO2gate insulators by controlling atomic-layer-deposition conditions
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6463/aa9489/pdf
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