Stability improvement of solution-processed IGZO TFTs by fluorine diffusion from a CYTOP passivation layer
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://iopscience.iop.org/article/10.1088/1361-6463/ab8e7d/pdf
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1. Working hypothesis to explore novel wide band gap electrically conducting amorphous oxides and examples
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4. Reduction of activation temperature at 150°C for IGZO films with improved electrical performance via UV-thermal treatment
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