Influence of internal stress and layer thickness on the formation of hydrogen induced thin film blisters in Mo/Si multilayers
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6463/aaad86/pdf
Reference55 articles.
1. Hydrogen bubbles in metals
2. Hydrogen blistering of silicon: Progress in fundamental understanding
3. Hydrogen Embrittlement of Metals: A Primer for the Failure Analyst
4. Overview of hydrogen embrittlement in high-Mn steels
5. Hydrogen Embrittlement Understood
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1. Surface-limited deuterium uptake of Ru films under plasma exposure;Journal of Applied Physics;2022-12-14
2. Evaluation of Hydrogen-Induced Blistering of Mo/Si Multilayers with a Capping Layer;Plasma and Fusion Research;2022-02-21
3. Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems;Small;2021-12-07
4. Microstructure evolution and hard x-ray reflectance of ultrathin Ru/C multilayer mirrors with different layer thicknesses;Materials Research Express;2021-02-01
5. In-situ studies of silicide formation during growth of molybdenum-silicon interfaces;Journal of Applied Physics;2019-10-07
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