The effect of the bottom electrode on ferroelectric tunnel junctions based on CMOS-compatible HfO2
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering
Link
http://iopscience.iop.org/article/10.1088/1361-6528/aac6b3/pdf
Reference24 articles.
1. Ferroelectric Memories
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3. Effects of high pressure nitrogen annealing on ferroelectric Hf0.5Zr0.5O2 films
4. Ten-Nanometer Ferroelectric $\hbox{Si:HfO}_{2}$ Films for Next-Generation FRAM Capacitors
5. Ferroelectricity in HfO2 enables nonvolatile data storage in 28 nm HKMG
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