Author:
Sapozhnikov I D,Gorbenko O M,Felshtyn M L,Zhukov M V,Golubok A O
Abstract
Abstract
The designs of combining a scanning probe microscope (SPM) with an optical microscope (OM) or scanning electron microscope (SEM) have been presented. To reduce the size of the SPM units the self-sensing probes and a piezo-inertial displacement system are proposed to use. The peculiarities of working of such SPM units are discussed. The examples of visualization of different nature objects in combined systems SPM-OM and SPM-SEM have been presented.
Cited by
1 articles.
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