Scanning ion-conductance microscope with modulation of the sample position along the Z-coordinate and separate Z-axial and lateral (X, Y) scanning

Abstract

Abstract Scanning ion-conductance microscope with independent piezoscanners in the lateral scanning plane XY and Z axis was designed and tested. For precise, fast and safe approach of the nanopipette to the sample surface, a coarse approach system based on a piezoinertial mover was used. Measurements of test periodic polymer structures were carried out using nanopipettes with an inner pipette diameter of about 100-150 nm. The optimal geometric parameters of the nanopipette were found and the resolution of the method was estimated. To increase the stability and reproducibility of SICM images, the Z-modulation of the position of the substrate with the sample was realized using a bimorph piezomembrane.