Automotive MEMS sensors based on additive technologies
Author:
Publisher
IOP Publishing
Subject
General Medicine
Link
http://stacks.iop.org/1757-899X/151/i=1/a=012024/pdf
Reference11 articles.
1. Sensitive Elements Based on Dielectric Membrane Structures
2. Analytical model of plasma-chemical etching in planar reactor
3. Modification Properties of the Dielectric Membrane Films using High Temperature Annealing
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