Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology-Reference-Cited by-同舟云学术

Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology

Published:2020-02 Issue: Volume:977 Page:238-243
ISSN:1662-9752
Container-title:Materials Science Forum
language:
Short-container-title:MSF

Author:

Samotaev Nikolay¹,Oblov Konstantin¹,Etrekova Maya¹,Veselov Denis¹,Gorshkova Anastasiya¹

Affiliation:

1. National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)

Abstract

This paper presents a modeling of technology aspects for fabrication ceramic microelectromechanical systems (MEMS) microhotplate and surface mounting device (SMD) packaging for (MOX) gas sensors applications. Innovative claims include: demonstration of flexible opportunities for new fabrication process flows based on laser micromilling tech; modeling of power consumption MEMS microhotplate depending on the thickness and topology; demonstration of necessity changing thick film technology of metallization to vacuum sputtering by reducing of power consumption. The results show possibility to fast fabrication of different topologies for ceramic MEMS microhotplate in form-factor of SOT-23 type SMD package.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

https://www.scientific.net/MSF.977.238.pdf

Reference11 articles.

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