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Sensitive Elements Based on Dielectric Membrane Structures

  • Published:2015 Issue: Volume:72 Page:500-503
  • ISSN:1875-3892
  • Container-title:Physics Procedia
  • language:en
  • Short-container-title:Physics Procedia

Author:

Veselov D.S.

Publisher

Elsevier BV

Subject

General Engineering

Reference7 articles.

1. Gas sensing properties of tin oxide thin films fabricated from hydrothermally heated nanoparticles;Sakai;Sensors & Actuators B,2001

2. Miniaturised arrays of tin oxide gas sensors on single microhotplate substrates fabricated by micromolding in capillaries;Heule;Sensors & Actuators B,2003

3. Gas sensors with thin membranes of nanocrystalline alumina as sensing elements;Vasiliev;Sensors & Systems,2006

4. Method for manufacturing multipurpose gas composition sensors;Veselov;R.F. Patent 2,2012

5. Technology for producing dielectric membrane structures for integrated gas-sensitive sensors;Veselov;Sensors & Systems,2011

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