Synthesis and Characterization of Tantalum Oxide Deposited By Metal-Organic Chemical Vapour Deposition (MOCVD)
Author:
Publisher
IOP Publishing
Subject
General Medicine
Link
http://stacks.iop.org/1757-899X/430/i=1/a=012049/pdf
Reference14 articles.
1. Optical properties in the UV range of a Ta2O5 inverse opal photonic crystal designed by MOCVD
2. Experimental and theoretical study of step coverage in metal-organic chemical vapor deposition of tantalum oxide thin films
3. Growth and characteristics of tantalum oxide thin films deposited using thermionic vacuum arc technology
4. A very promising piezoelectric property of Ta2O5 thin films. II: Birefringence and piezoelectricity
5. Tantalum and its alloys
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1. Optimization of electrolyte concentration for surface modification of tantalum using plasma electrolytic nitridation;International Journal of Refractory Metals and Hard Materials;2020-02
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