Author:
Chen Shu-Jung,Ding Ruei-Ting
Reference7 articles.
1. Micromachined Thermal Flow Sensors—A Review;Kuo;Micromachines,2012
2. Miniature and MEMS-type vacuum sensors and pumps;Gorecka-Drzazga;Vacuum,2009
3. Integrated Vacuum Sensor;Van Herwaarden;Sens. Actuators,1985
4. Multipurpose MEMS thermal sensor based on thermopiles;Randjeloviu;Sensor Actuat A-Phys,2008
5. Djuriu, Multipurpose MEMS thermal sensor based on thermopiles;Randjeloviu;Microelectron. Eng.,2009
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