A Performance Enhancement Method for Thermopile Sensors Using a Chip Probe Test System
Author:
Affiliation:
1. Institute of Microelectronics of Chinese Academy of Sciences,Beijing,China,100029
2. Jiangsu Hinovaic Technologies Co., Ltd,Wuxi,China,214135
Funder
National Natural Science Foundation of China
Youth Innovation Promotion Association
Chinese Academy of Sciences
Research and Development
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052327.pdf?arnumber=10052327
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1. Infrared Thermopile Sensors with in-Situ Integration of Composite Nanoforests for Enhanced Optical Absorption
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5. Research on a CMOS-MEMS Infrared Sensor with Reduced Graphene Oxide
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