Author:
Van Herwaarden A.W.,Sarro P.M.,Meijer H.C.
Reference7 articles.
1. Thermopiles fabricated using silicon planar technology;Nieveld;Sensors and Actuators,1983
2. The Seebeck effect in silicon ICs;van Herwaarden;Sensors and Actuators,1984
3. Extension of the range for measuring vacuum by the thermoelectrical method;Korsunskii;Instrum. Exp. Tech.,1961
4. A single crystal semiconductor vacuum gauge with extended range;Bretschi;J. Phys. E,1976
5. Simple vacuum gauge using TaN thin films in the pressure range of 105 to 10−3 Pa;Shioyama;J. Vac. Sci. Technol.,1978
Cited by
39 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献