Effect of Argon Gas Flow Rate on the Optical and Mechanical Properties of Sputtered Tungsten Thin Film Coatings
Author:
Publisher
IOP Publishing
Subject
General Medicine
Link
http://stacks.iop.org/1757-899X/149/i=1/a=012075/pdf
Reference13 articles.
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Planar Magnetron Sputtering System with Electron Injection and Reflecting Electrode;Plasma Physics Reports;2023-06
2. Effect of argon flow rate and direct current bias on the growth of boron nitride coating in low-temperature plasma;AIP Advances;2022-08-01
3. Deposition of tungsten disilicide films by DC magnetron sputtering at ultra-low operating pressure;Surface and Coatings Technology;2021-09
4. Impact of Ar Flow Rates on Micro-Structural Properties of WS2 Thin Film by RF Magnetron Sputtering;Nanomaterials;2021-06-22
5. Analysis of Tungsten-Alumina Nanocomposite Thin Films on SS304 Substrate;Applied Mechanics and Materials;2021-04
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