Synthesis and characterization of highly c-textured Al(1-x)Sc(x)N thin films in view of telecom applications
Author:
Publisher
IOP Publishing
Subject
General Medicine
Link
http://stacks.iop.org/1757-899X/41/i=1/a=012014/pdf
Reference6 articles.
1. Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
2. Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films
3. Origin of the Anomalous Piezoelectric Response in WurtziteScxAl1−xNAlloys
4. Increased electromechanical coupling in w−ScxAl1−xN
5. Improvement in crystal orientation of AlN thin films prepared on Mo electrodes using AlN interlayers
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Doping Engineering for Optimizing Piezoelectric and Elastic Performance of AlN;Materials;2023-02-21
2. BAW Resonator with an Optimized SiO2/Ta2O5 Reflector for 5G Applications;ACS Omega;2022-06-06
3. Wide Band BAW Filter Based on Single-Crystalline LiNbO₃ Thin Film With Insulating Bragg Reflector;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2022-04
4. X band film bulk acoustic wave resonator based on single crystalline LiNbO3 thin films with SiO2/Ta2O5 reflector;Materials Express;2022-03-01
5. Mo/Ti multilayer Bragg reflector for LiNbO3 film bulk acoustic wave resonators;Journal of Applied Physics;2020-09-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3