BAW Resonator with an Optimized SiO2/Ta2O5 Reflector for 5G Applications
Author:
Affiliation:
1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China
Funder
Ministry of Science and Technology of the People's Republic of China
National Natural Science Foundation of China
Publisher
American Chemical Society (ACS)
Subject
General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acsomega.2c01749
Reference22 articles.
1. Thin film bulk wave acoustic resonators (FBAR) for wireless applications
2. Solidly mounted resonators fabricated for GHz frequency applications based on MgxZn1-xO piezoelectric film
3. AlN solidly mounted resonators for high temperature applications
4. Influence of α- and β-W phases on performance of SMR devices
5. Process optimization and device variation of Mg-doped ZnO FBARs
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