Formation of dust in low-pressure magnetized hydrocarbon plasmas
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference31 articles.
1. Dust particle formation in low pressure Ar/CH4 and Ar/C2H2 discharges used for thin film deposition
2. Plasma chemistry and growth of nanosized particles in a C2H2RF discharge
3. Growth precursors and dynamics of dust particle formation in the Ar/CH4and Ar/C2H2plasmas
4. The role of C2H4for the acetylene chemistry in particle forming Ar/He/C2H2plasmas studied via quantitative mass spectrometry
5. In-situ analysis of particle contamination in magnetron sputtering processes
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2. Charging and heating processes of dust particles in an electron cyclotron resonance plasma;Plasma Sources Science and Technology;2019-08-07
3. Study of dust formation routes by time-resolved in situ multi-pass laser extinction method and laser scattering imaging in microwave magnetized plasma;Plasma Sources Science and Technology;2019-06-11
4. The thermal radiation effect of substrate on nano-microsized particles levitating in low-pressure reactive plasmas;Applied Materials Today;2017-06
5. Influence of a magnetic field on the formation of carbon dust particles in very low-pressure high-density plasmas;Journal of Physics D: Applied Physics;2017-03-10
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