Author:
Selwyn Gary S,Weiss Corey A,Sequeda Federico,Huang Carrie
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference21 articles.
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3. Impact of vacuum equipment contamination on semiconductor yield
4. Charging of particles in a plasma
5. A model for particulate contaminated glow discharges
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