High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopy
Author:
Publisher
Informa UK Limited
Subject
General Materials Science
Link
http://www.tandfonline.com/doi/pdf/10.1088/1468-6996/12/5/054201
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1. Combinatorial solid-state chemistry of inorganic materials
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5. A digital holographic microscope for complete characterization of microelectromechanical systems
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