Nanoscale Film Thickness Gradients Printed in Open Air by Spatially Varying Chemical Vapor Deposition-Reference-Cited by-同舟云学术

Nanoscale Film Thickness Gradients Printed in Open Air by Spatially Varying Chemical Vapor Deposition

Published:2021-06-10 Issue:31 Volume:31 Page:2103271
ISSN:1616-301X
Container-title:Advanced Functional Materials
language:en
Short-container-title:Adv. Funct. Mater.

Author:

Alshehri Abdullah H.¹²³,Loke Jhi Yong¹²,Nguyen Viet Huong⁴,Jones Alexander¹²,Asgarimoghaddam Hatameh¹²,Delumeau Louis‐Vincent¹,Shahin Ahmed¹²,Ibrahim Khaled H.¹²,Mistry Kissan¹²,Yavuz Mustafa¹²,Muñoz‐Rojas David⁵,Musselman Kevin P.¹²^ORCID

Affiliation:

1. Department of Mechanical and Mechatronics Engineering University of Waterloo 200 University Ave. West Waterloo N2L 3G1 Canada

2. Waterloo Institute for Nanotechnology University of Waterloo 200 University Ave. West Waterloo N2L3G1 Canada

3. Department of Mechanical Engineering Prince Sattam bin Abdul Aziz University Alkharj 11942 Saudi Arabia

4. Faculty of Electrical and Electronic Engineering Phenikaa University Hanoi 12116 Vietnam

5. Univ. Grenoble Alpes CNRS Grenoble INP LMGP Grenoble 38000 France

Funder

Prince Sattam bin Abdulaziz University

Agence Nationale de la Recherche

Natural Sciences and Engineering Research Council of Canada

Publisher

Wiley

Subject

Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adfm.202103271

Reference76 articles.

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3. Low Temperature Chemical Vapor Deposition Using Atomic Layer Deposition Chemistry

4. Real-time observation and optimization of tungsten atomic layer deposition process cycle

5. Anomalously high alumina atomic layer deposition growth per cycle during trimethylaluminum under-dosing conditions

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