Correlating Optical Microspectroscopy with 4×4 Transfer Matrix Modeling for Characterizing Birefringent Van der Waals Materials

Author:

Schwarz Julian1ORCID,Niebauer Michael1ORCID,Koleśnik‐Gray Maria2,Szabo Maximilian3ORCID,Baier Leander3,Chava Phanish4ORCID,Erbe Artur4ORCID,Krstić Vojislav2ORCID,Rommel Mathias3ORCID,Hutzler Andreas15ORCID

Affiliation:

1. Friedrich‐Alexander‐Universität Erlangen‐Nürnberg (FAU) Electron Devices, Cauerstraße 6 91058 Erlangen Germany

2. Friedrich‐Alexander‐Universität Erlangen‐Nürnberg (FAU) Applied Physics, Staudtstraße 7 91058 Erlangen Germany

3. Fraunhofer Institute for Integrated Systems and Device Technology IISB Schottkystraße 10 91058 Erlangen Germany

4. Helmholtz‐Zentrum Dresden‐Rossendorf (HZDR) Institute of Ion Beam Physics and Materials Research Bautzner Landstrasse 400 01328 Dresden Germany

5. Forschungszentrum Jülich GmbH Helmholtz Institute Erlangen‐Nürnberg for Renewable Energy (IEK‐11) Cauerstraße 1 91058 Erlangen Germany

Abstract

AbstractVan der Waals materials exhibit intriguing properties for future electronic and optoelectronic devices. As those unique features strongly depend on the materials' thickness, it has to be accessed precisely for tailoring the performance of a specific device. In this study, a nondestructive and technologically easily implementable approach for accurate thickness determination of birefringent layered materials is introduced by combining optical reflectance measurements with a modular model comprising a 4×4 transfer matrix method and the optical components relevant to light microspectroscopy. This approach is demonstrated being reliable and precise for thickness determination of anisotropic materials like highly oriented pyrolytic graphite and black phosphorus in a range from atomic layers up to more than 100 nm. As a key feature, the method is well‐suited even for encapsulated layers outperforming state of‐the‐art techniques like atomic force microscopy.

Funder

Deutsche Forschungsgemeinschaft

Publisher

Wiley

Subject

General Materials Science,General Chemistry

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