Emission and capture characteristics of electron trap (E emi = 0.8 eV) in Si-doped β-Ga2O3 epilayer

Author:

Qu HaolanORCID,Chen JiaxiangORCID,Zhang YuORCID,Sui Jin,Gu Yitian,Deng Yuxin,Su Danni,Zhang Ruohan,Lu XingORCID,Zou XinboORCID

Abstract

Abstract By deep level transient spectroscopy (DLTS), emission and capture behaviors have been explicitly investigated for a single electron trap in a Si-doped β-Ga2O3 epilayer. Trap characteristics including activation energy for emission (E emi = 0.8 eV), capture cross-section of 6.40 × 10−15 cm2 and lambda-corrected trap concentration (N Ta) of 2.48 × 1013 cm−3 were revealed, together with non-emission region width (λ = 267.78 nm). By isothermal DLTS, in addition to the impact of temperature, electric-field-enhanced trap emission kinetics were studied. When a relatively low electric field was applied (E ⩽ 1.81 × 105 V cm−1 at 330 K), emission kinetics of the trap was modeled to comply with phonon-assisted tunneling, whereas the emission process was regarded to be dominated by direct tunneling for a relatively high electric field (E ⩾ 1.81 × 105 V cm−1 at 330 K). A thermal-enhanced capture process has also been disclosed and quantitatively studied, where a capture barrier energy of 0.15 eV was extracted.

Funder

National Natural Science Foundation of China

CAS Strategic Science and Technology Program

ShanghaiTech University Startup Fund

Natural Science Foundation of Shanghai

Publisher

IOP Publishing

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

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