Protons, ions, electrons and the future of the SEM
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/241/i=1/a=012002/pdf
Reference12 articles.
1. SMART - a program to measure SEM resolution and imaging performance
2. STEM Imaging of Lattice Fringes and beyond in a UHR In-Lens Field-Emission SEM
3. Very low energy microscopy in commercial SEMs
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