Development of A four-Degrees-of-Freedom Diffraction Sensor

Author:

Liu Chien-Hung,Jywe Wen-Yuh,Chen Cha'o-Kuang,Hsien W H,Shyu Lih-Horng,Ji Liang-Wen,Liu Van-Tsai,Hsu Tung-Hui,Chen Chih-Da

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Codes coupling optimization for absolute measurement;Optical Metrology and Inspection for Industrial Applications X;2023-11-27

2. Modeling and test of an absolute four-degree-of-freedom (DOF) grating encoder;Optical Metrology and Inspection for Industrial Applications IX;2022-12-19

3. An Ultra-Precision Absolute-Type Multi-Degree-of-Freedom Grating Encoder;Sensors;2022-11-22

4. Techniques of multi-degree-of-freedom measurement on the linear motion errors of precision machines;Advanced Optical Technologies;2014-01-01

5. Multi-degree-of-freedom motion error measurement in an ultraprecision machine using laser encoder — Review;Journal of Mechanical Science and Technology;2013-01

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