Author:
Fan Kuang-Chao,Wang Hung-Yu,Yang Hao-Wei,Chen Li-Min
Abstract
AbstractAny axis of precision machines possesses six-degree-of-freedom (6-DOF) motion errors, also called the geometric errors, due to manufacturing tolerances and assembly errors, namely three linear and three angular errors. Conventional optical instruments allow measurement of only one or two errors at a time. In order to achieve fast measurement, many multi-degree-of-freedom measurement (MDFM) systems have been developed over the past 20 years, from three-degree-of-freedom (3-DOF) to 6-DOF. This article summarizes reports of optical measurement techniques of MDFM systems for precision linear, planar and XYZ stages. Comments are also given for the applicability to practical uses.
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
20 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献