Crystalline growth of AlN thin films by atomic layer deposition
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/757/i=1/a=012003/pdf
Reference14 articles.
1. Structural and optical characterization of low-temperature ALD crystalline AlN
2. Atomic layer deposition of AlN for thin membranes using trimethylaluminum and H2/N2 plasma
3. Temperature dependence of the thermal expansion of AlN
4. Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition
5. Growth of aluminum nitride thin films prepared by plasma-enhanced atomic layer deposition
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